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Microlithography

Kazuaki Suzuki

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Autorius Kazuaki Suzuki
Kalba Anglų k.
Žanras Engineering
Leidimo metai 2024 m.
Puslapių skč. 850 psl.
Viršelis Minkštas viršelis
ISBN 9781032836737
Leidimas 3 ed

Microlithography

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

Book cover of: Microlithography. By: Kazuaki Suzuki

Microlithography

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