X-Ray Metrology in Semiconductor Manufacturing

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296 psl.

2006 m.

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Vöötkood: 9780849339288
Kirjeldus

Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.